EN 62047-5:2012
Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches

Standard No.

EN 62047-5:2012

Release Date

2012

Published By

European Committee for Electrotechnical Standardization（CENELEC）

Latest

EN 62047-5:2012

EN 62047-5:2012 history

• 2012 EN 62047-5:2012 Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches
• 2011 EN 62047-5:2011 Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches