NF C96-050-10*NF EN 62047-10:2012
Semiconductor devices - Micro-electromechanical devices - Part 10: micro-pillar compression test for MEMS materials

Standard No.

NF C96-050-10*NF EN 62047-10:2012

Release Date

2012

Published By

Association Francaise de Normalisation

Latest

NF C96-050-10*NF EN 62047-10:2012

NF C96-050-10*NF EN 62047-10:2012 history

• 2012 NF C96-050-10*NF EN 62047-10:2012 Semiconductor devices - Micro-electromechanical devices - Part 10: micro-pillar compression test for MEMS materials