NF C96-050-13*NF EN 62047-13:2012
Semiconductor devices - Micro-electromechanical devices - Part 13: bend- and shear- type test methods of measuring adhesive strenght for MEMS structures

Standard No.

NF C96-050-13*NF EN 62047-13:2012

Release Date

2012

Published By

Association Francaise de Normalisation

Latest

NF C96-050-13*NF EN 62047-13:2012

NF C96-050-13*NF EN 62047-13:2012 history

• 2012 NF C96-050-13*NF EN 62047-13:2012 Semiconductor devices - Micro-electromechanical devices - Part 13: bend- and shear- type test methods of measuring adhesive strenght for MEMS structures