LST EN 62047-13-2012
Semiconductor devices - Micro-electromechanical devices -- Part 13: Bend- and shear- type test methods of measuring adhesive strength for MEMS structures (IEC 62047-13:2012)

Standard No.

LST EN 62047-13-2012

Release Date

2012

Published By

Lithuanian Standards Office

Latest

LST EN 62047-13-2012

LST EN 62047-13-2012 history

• 2012 LST EN 62047-13-2012 Semiconductor devices - Micro-electromechanical devices -- Part 13: Bend- and shear- type test methods of measuring adhesive strength for MEMS structures (IEC 62047-13:2012)