DIN EN ISO 14644-9:2012 PDF

Scope: This part of ISO 14644 establishes the classification of cleanliness levels on solid surfaces by particle concentration in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods, as well as information about surface characteristics, are given in Annexes A to D. This part of ISO 14644 applies to all solid surfaces in cleanrooms and associated controlled environments, such as walls, ceilings, floors, working environments, tools, equipment and products. The classification of surface cleanliness by particle concentration (SCP) is limited to particles between 0,05 pm and 500μm.

DIN EN ISO 14644-9:2012 Referenced Document

ISO 14644-6:2007 Cleanrooms and associated controlled environments - Part 6: Vocabulary

2022 DIN EN ISO 14644-9:2022-10 Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration (ISO 14644-9:2022); German version EN ISO 14644-9:2022
1970 DIN EN ISO 14644-9 E:2022-02 Clean rooms and related controlled environments Part 9: Surface cleanliness classification by particle concentration method (draft)
2012 DIN EN ISO 14644-9:2012 Cleanrooms and associated controlled environments.Part 9: Classification of surface cleanliness by particle concentration (ISO 14644-9:2012); German version EN ISO 14644-9:2012
2008 DIN EN ISO 14644-9:2008 Cleanrooms and associated controlled environments - Part 9: Classification of surface particle cleanliness (ISO/DIS 14644-9:2008); German version prEN ISO 14644-9:2008