LST EN 62047-12-2011
Semiconductor devices - Micro-electromechanical devices -- Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures (IEC 62047-12:2011)

Standard No.

LST EN 62047-12-2011

Release Date

2011

Published By

Lithuanian Standards Office

Latest

LST EN 62047-12-2011

LST EN 62047-12-2011 history

• 2011 LST EN 62047-12-2011 Semiconductor devices - Micro-electromechanical devices -- Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures (IEC 62047-12:2011)