LST EN 62047-6-2010
Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials (IEC 62047-6:2009)

Standard No.

LST EN 62047-6-2010

Release Date

2010

Published By

Lithuanian Standards Office

Latest

LST EN 62047-6-2010

LST EN 62047-6-2010 history

• 2010 LST EN 62047-6-2010 Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials (IEC 62047-6:2009)