DS/EN 62374-1:2011
Semiconductor devices - Part 1: Time-dependent dielectric breakdown (TDDB) test for inter-metal layers

Standard No.

DS/EN 62374-1:2011

Release Date

2011

Published By

Danish Standards Foundation

Status

Be replaced 2011-07

Replace By

DS/EN 62374-1/AC:2011

Latest

DS/EN 62374-1/AC:2011

Replace

DS/EN 62374-2007

Scope

IEC 62374-1:2010 describes a test method, test structure and lifetime estimation method of the time-dependent dielectric breakdown (TDDB) test for inter-metal layers applied in semiconductor devices.

DS/EN 62374-1:2011 history

• 2011 DS/EN 62374-1/AC:2011 Semiconductor devices - Part 1: Time-dependent dielectric breakdown (TDDB) test for inter-metal layers
• 2011 DS/EN 62374-1:2011 Semiconductor devices - Part 1: Time-dependent dielectric breakdown (TDDB) test for inter-metal layers