DS/EN 62047-5:2011
Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches

Standard No.
DS/EN 62047-5:2011
Release Date
2011
Published By
Danish Standards Foundation
Latest
DS/EN 62047-5:2011
Scope
This part of IEC 62047 describes terminology, definition, symbols, test methods that can be used to evaluate and determine the essential ratings and characteristic parameters of RF MEMS switches. The statements made in this standardization are also applicable to RF (Radio Frequency) MEMS (Micro-Electro-Mechanical Systems) switches with various structures, contacts (d.c. contact and capacitive contact), configurations (series and shunt), switching networks (SPST, SPDT, DPDT, etc.), and actuation mechanism such as electrostatic, electro-thermal, electromagnetic, piezoelectric, etc. The RF MEMS switches are promising devices in advanced mobile phones with mult

DS/EN 62047-5:2011 history

  • 2011 DS/EN 62047-5:2011 Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches



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