This International Standard specifies a standard test piece, which is used to guarantee thepropriety and accuracy of a tensile testing system for thin film materials with length and widthunder 1 mm and thickness under 10 µm, which are main structural materials for microelectromechanical systems (MEMS), micromachines and similar devices.This International Standard is based on such a concept that a tensile testing system can beguaranteed in propriety and accuracy, when the measured tensile strengths of the standardtest pieces, whose tensile strength is pre-determined, are within the designated range. It alsospecifies the test pieces to minimize characteristic
DS/EN 62047-3:2007 history
2007DS/EN 62047-3:2007 Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile testing