GB/T 28632-2012 (English Version) PDF

Standard No.: GB/T 28632-2012
Language: Chinese, Available in English version
Release Date: 2012
Published By: General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
Latest: GB/T 28632-2012

Scope: This standard specifies the method for measuring the lateral resolution of Auger electron spectrometer and X-ray photoelectron spectrometer under three conditions. The straight-edge method is suitable for instruments with expected lateral resolutions greater than 1 µm. The grid method is suitable for instruments whose lateral resolution is expected to be greater than 20nm and less than 1μm. The Golden Island rule applies to instruments with expected lateral resolutions less than 50nm. Appendix A, Appendix B and Appendix C give examples of band diagrams for measuring lateral resolution.

GB/T 28632-2012 Referenced Document

2012 GB/T 28632-2012 Surface chemical analysis.Auger electron spectroscopy and X-ray photoelectron spectroscopy.Determination of lateral resolution