GB/T 28275-2012
Silicon-based MEMS fabrication technology.Specification for KOH etch process (English Version)

Standard No.

GB/T 28275-2012

Language

Chinese, Available in English version

Release Date

2012

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Latest

GB/T 28275-2012

Scope

This standard specifies the process requirements that should be followed when using potassium hydroxide corrosion process to process MEMS devices. This standard applies to potassium hydroxide corrosion process and management.

GB/T 28275-2012 Referenced Document

• GB 50073-2001 Code for design of clean room
• GB/T 1031-2009 Geometrical Product Specifications(GPS).Surface texture:Profile method.Surface roughness parameters and their values
• GB/T 26111-2010 Micro-electromechanical system techology.Terms

GB/T 28275-2012 history

• 2012 GB/T 28275-2012 Silicon-based MEMS fabrication technology.Specification for KOH etch process