BS EN 62047-12:2011
Semiconductor devices. Micro-electromechanical devices. Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
- Standard No.
- BS EN 62047-12:2011
- Release Date
- 2011
- Published By
- British Standards Institution (BSI)
- Latest
- BS EN 62047-12:2011
BS EN 62047-12:2011 history
- 2011 BS EN 62047-12:2011 Semiconductor devices. Micro-electromechanical devices. Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
