ISO 13084:2011
Surface chemical analysis - Secondary-ion mass spectrometry - Calibration of the mass scale for a time-of-flight secondary-ion mass spectrometer
- Standard No.
- ISO 13084:2011
- Release Date
- 2011
- Published By
- International Organization for Standardization (ISO)
- Status
- Replace By
- ISO 13084:2018
- Latest
- ISO 13084:2018
- Scope
- This International Standard specifies a method to optimize the mass calibration accuracy in time-of-flight SIMS instruments used for general analytical purposes. It is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. Guidance is provided for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy.
ISO 13084:2011 history
- 2018 ISO 13084:2018 Surface chemical analysis — Secondary ion mass spectrometry — Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer
- 2011 ISO 13084:2011 Surface chemical analysis - Secondary-ion mass spectrometry - Calibration of the mass scale for a time-of-flight secondary-ion mass spectrometer
