This part of IEC 62047 describes generic specifications for micro-electromechanical systems
(MEMS) made by semiconductors, which are the basis for specifications given in other parts
of this series for various types of MEMS applications such as sensors, RF MEMS, excluding
optical MEMS, bio MEMS, micro TAS, and power MEMS. This standard specifies general
procedures for quality assessment to be used in IECQ-CECC systems and establishes
general principles for describing and testing of electrical, optical, mechanical and
environmental characteristics.
This part of IEC 62047 aids in the preparation of standards that define devices and systems
made by micromachining technology, including but not limited to, material characterization
and handling, assembly and testing, process control and measuring methods. MEMS
described in this standard are basically made of semiconductor material. However, the
statements made in this standard are also applicable to MEMS using materials other than
semiconductor, for example, polymers, glass, metals and ceramic materials.
BS EN 62047-4:2010 history
2010BS EN 62047-4:2010 Semiconductor devices. Micro-electromechanical devices. Generic specification for MEMS