GB/T 25755-2010
Vacuum technology.Sputter-ion pumps.Measurement of performance characteristics (English Version)

Standard No.

GB/T 25755-2010

Language

Chinese, Available in English version

Release Date

2010

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Latest

GB/T 25755-2010

Scope

This standard specifies the measurement methods for the performance parameters of sputter ion pumps (hereinafter referred to as ion pumps). This standard applies to ion pumps with a nominal volume flow rate greater than 10L/s. The standard measures the pressure range of the volumetric flow rate from 1.5×10^-3Pa to 1×10^-7Pa.

GB/T 25755-2010 Referenced Document

• GB/T 3163 Vacuum technology.Terminology

GB/T 25755-2010 history

• 2010 GB/T 25755-2010 Vacuum technology.Sputter-ion pumps.Measurement of performance characteristics