GOST 26239.8-1984 Semiconductor silicon and raw materials for its production. Method of dichlorsilane, trichlorsilane and silicon tetrachloride determination
GOST 26239.0-1984 Semiconductor silicon, raw materials for its production and quartz. General requirements for methods of analysis
GOST 9293-1974 Gaseous and liquid nitrogen. Specifications
GOST 26239.8-1984 history
1984GOST 26239.8-1984 Semiconductor silicon and raw materials for its production. Method of dichlorsilane, trichlorsilane and silicon tetrachloride determination