ISO 25498:2010 Microbeam analysis - Analytical electron microscopy - Selected-area electron diffraction analysis using a transmission electron microscope
This International Standard specifies the method of selected-area electron diffraction (SAED) analysis using a
transmission electron microscope (TEM) to analyse micrometer and sub-micrometer sized areas of thin
crystalline specimens. Such specimens can be obtained in the form of thin sections from a variety of metallic
and non-metallic materials, as well as fine powders, or alternatively by the use of extraction replicas. The
minimum diameter of the selected area in a specimen which can be analysed by this method depends on the
spherical aberration coefficient of the objective lens of the microscope and approaches 0,5 μm for a modern
TEM.
When the diameter of an analysed specimen area is smaller than 0,5 μm, the analysis procedure can also be
referred to this International Standard but, because of the effect of spherical aberration, some of the diffraction
information in the pattern can be generated from outside of the area defined by the selected-area aperture. In
such cases, the use of microdiffraction or convergent beam electron diffraction, where available, might be
preferred.
The success of the selected-area electron diffraction method relies on the validity of indexing the diffraction
patterns arising, irrespective of which axis in the specimen lies parallel to the incident electron beam. Such
analysis is therefore aided by specimen tilt and rotation facilities.
This International Standard is applicable to acquisition of SAED patterns from crystalline specimens, indexing
the patterns and calibration of the diffraction constant.
ISO 25498:2010 Referenced Document
ISO/IEC 17025 General requirements for the competence of testing and calibration laboratories [Standard in French]*, 2017-11-01 Update
ISO 25498:2010 history
2018ISO 25498:2018 Microbeam analysis - Analytical electron microscopy - Selected area electron diffraction analysis using a transmission electron microscope
2010ISO 25498:2010 Microbeam analysis - Analytical electron microscopy - Selected-area electron diffraction analysis using a transmission electron microscope