International Organization for Standardization (ISO)
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ISO 29081:2010
Scope
This International Standard specifies the minimum amount of information required for describing the methods
of charge control in measurements of Auger electron transitions from insulating specimens by electronstimulated
Auger electron spectroscopy and to be reported with the analytical results. Information is provided
in Annex A on methods that have been found useful for charge control prior to or during AES analysis. This
annex also contains a table summarizing the methods or approaches, ordered by simplicity of approach.
Some methods will be applicable to most instruments, others require special hardware, others might involve
remounting the specimen or changing it. A similar International Standard has been published for X-ray
photoelectron spectroscopy.
ISO 29081:2010 Referenced Document
ISO 17973 Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis*, 2016-09-01 Update
ISO 17974 Surface chemical analysis - High-resolution Auger electron spectrometers - Calibration of energy scales for elemental and chemical-state analysis
ISO 18115 Surface chemical analysis - Vocabulary; Amndment 2
ISO 29081:2010 history
2010ISO 29081:2010 Surface chemical analysis - Auger electron spectroscopy - Reporting of methods used for charge control and charge correction