BS ISO 14594:2003
Microbeam analysis - Electron probe microanalysis - Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy

Standard No.

BS ISO 14594:2003

Release Date

2004

Published By

British Standards Institution (BSI)

Status

Be replaced 2014-11

Replace By

BS ISO 14594:2014

Latest

BS ISO 14594:2014

Replace

01/122895 DC:2001

Scope

This International Standard gives the general guidelines for the determination of experimental parameters relating to the primary beam, the wavelength spectrometer and the sample that need to be taken into account when carrying out electron probe microanalysis. It also defines procedures for the determination of beam current, current density, dead time, wavelength resolution, background, analysis area, analysis depth and analysis volume. This International Standard is intended for the analysis of a well-polished sample using normal beam incidence, and the parameters obtained may only be indicative for other experimental conditions. This international standard is not designed to be used for energy dispersive X-ray spectroscopy.

BS ISO 14594:2003 history

• 2014 BS ISO 14594:2014 Microbeam analysis. Electron probe microanalysis. Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy
• 2004 BS ISO 14594:2003 Microbeam analysis - Electron probe microanalysis - Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy