GB/T 4061-2009 (English Version) PDF

Standard No.: GB/T 4061-2009
Language: Chinese, Available in English version
Release Date: 2009
Published By: General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
Latest: GB/T 4061-2009
Replace: GB/T 4061-1983

Scope: This standard specifies the test method for cross-section interlayer chemical corrosion of silicon polycrystalline rods that are made of trichlorosilane and tetrachlorosilane as raw materials and reduced with hydrogen in a reduction furnace. The inspection of section interlayers in this standard is applicable to polycrystalline silicon rods grown by reduction deposition with hydrogen in a reduction furnace using trichlorosilane and tetrachlorosilane as raw materials and thin silicon cores as heating elements.

GB/T 4061-2009 history

2009 GB/T 4061-2009 Polycrystalline silicon-examination method-assessment of sandwiches on cross-section by chemical corrosion
1983 GB/T 4061-1983 Polycrystalline silicon--Examination method--Assessment of sandwiches on cross-section by chemical corrosion