Adopts ISO 22048:2004 to specify a digital format to store and transfer between computers, in a compact way, important calibration and instrumental-parameter data necessary to make effective use of spectral-data files from static SIMS instruments.
AS ISO 22048:2006 history
0000 AS ISO 22048:2006(R2016)
1970AS ISO 22048:2006 Surface chemical analysis - Information format for static secondary-ion mass spectrometry