JIS B 8328:2009
Vacuum technology -- Turbomolecular pumps -- Measurement of performance characteristics

Standard No.

JIS B 8328:2009

Release Date

2009

Published By

Japanese Industrial Standards Committee (JISC)

Latest

JIS B 8328:2009

Scope

This Standard specifies the measurement methods for performance characteristics of turbomolecular pumps.

JIS B 8328:2009 Referenced Document

• JIS Z 8126-2 Vacuum technology -- Vocabulary -- Part 2: Vacuum pumps and related terms

JIS B 8328:2009 history

• 2009 JIS B 8328:2009 Vacuum technology -- Turbomolecular pumps -- Measurement of performance characteristics