General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
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GB/T 23414-2009
Scope
This standard defines terms used in the practice of scanning electron microscopy (SEM). Includes general terms and terms of specific concepts classified by technology, and also includes terms already defined in ISO 23833. This standard applies to all standardized documents related to SEM practice. In addition, some definitions of terms in this standard are also applicable to documents in related fields (for example: Electron Probe Microanalysis (EPMA), Analytical Electron Microscopy (AEM), Energy Spectroscopy (EDX), etc.].
GB/T 23414-2009 history
2009GB/T 23414-2009 Microbeam analysis.Scanning electron microscopy.Vocabulary