SJ 20984-2008 (English Version) PDF

Scope: This specification specifies the requirements, quality assurance regulations, and delivery preparation for chemical vapor deposition equipment. This specification applies to chemical vapor deposition equipment for the development and production of optoelectronic and microelectronic devices in the electronics industry. Similar equipment in other industries can also be implemented with reference.

SJ 20984-2008 Referenced Document

GB 5226.1-2002 Safety of machinery--Electrical equipment of machines--Part 1: General requirements
GB/T 13384-1992 General speifications for packagings of mechanical and electrical products
GB/T 17626.1-1998 Electromagnetic compatibility Testing and measurement techniques Overview of immunity tests
GB/T 191 Packaging.Pictorial marking for handling of goods
GB/T 5080.7-1986 Equipment reliability testing--Compliance test plans for failure rate and mean time between failures assuming constant failure rate
GB/T 6388 Transport package shipping mark
SJ 1276-1977 Techical requirements for quality inspection of metallic coatings and chemically treated layers
SJ/T 10674-1995 Generic specification for coating with coat
SJ/T 37-1996 Model-drafting and designating methods of special equipment for electronics industry

2008 SJ 20984-2008 General specification for chemical vapor deposition (CVD) equipment