GB 50467-2008
Code for construction and acceptance of micro-electronics manufacturing equipment installation engineering (English Version)
- Standard No.
- GB 50467-2008
- Language
- Chinese, Available in English version
- Release Date
- 2008
- Published By
- General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
- Latest
- GB 50467-2008
- Scope
- This specification is formulated in order to standardize the construction of microelectronic production equipment installation projects, ensure the installation quality and reliable operation of microelectronic production equipment, and promote the development of microelectronic production equipment installation technology. This specification is applicable to the construction and acceptance of integrated circuit and semiconductor discrete device production equipment installation projects. This specification does not include integrated circuit and semiconductor discrete device production equipment linkage debugging and trial production. The requirements for construction and quality acceptance of engineering technical documents and contract documents used in the construction of microelectronics production equipment installation projects shall not be lower than those specified in this specification. The installation of microelectronics production equipment should be carried out according to the approved design drawings, and the modification of the design should be notified by the original design unit. The instruments and meters used for testing shall pass the verification of the national legal metrology verification institution, and shall be used within the validity period of the verification. The construction and acceptance of the microelectronics production equipment installation project shall not only comply with this specification, but also comply with the current relevant national standards.
GB 50467-2008 history
- 2008 GB 50467-2008 Code for construction and acceptance of micro-electronics manufacturing equipment installation engineering
