GB/T 22572-2008
A Method for Estimating Depth-Resolved Parameters Using Multi-delta Layered Reference Materials for Secondary Ion Mass Spectrometry in Surface Chemistry (English Version)

Standard No.

GB/T 22572-2008

Language

Chinese, Available in English version

Release Date

2008

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Latest

GB/T 22572-2008

Scope

This standard specifies the steps for evaluating the three depth resolution parameters of leading decay length, trailing decay length and Gaussian broadening with multi-8 layers of reference material in SIMS depth profiling. Since the physical and chemical state of the sample surface is unstable due to the impact of primary ions, this standard does not apply to the 8 layers near the surface area.

GB/T 22572-2008 history

• 2008 GB/T 22572-2008 A Method for Estimating Depth-Resolved Parameters Using Multi-delta Layered Reference Materials for Secondary Ion Mass Spectrometry in Surface Chemistry