This standard specifies a method for calibrating binding energy scales of X-ray electron spectrometers using non-monochromatic Al or Mg X-rays or monochromatic Al X-rays for general analytical purposes. It is only suitable for instruments with an ion gun for sputter cleaning. This standard further specifies a method to establish a calibration procedure, test the linearity of the binding energy scale at a certain energy value in the middle, take a point in each of the high and low binding energy regions to confirm the uncertainty of the calibration of the scale, and the small drift of the scale Make corrections and specify the expanded uncertainty of the calibration of the binding energy scale at the 95% confidence level. This uncertainty includes contributions from phenomena observed in interlaboratory studies, but does not cover all possible imperfections. This standard does not apply to instruments with the following conditions: the error of the binding energy scale changes significantly nonlinearly with the energy, works in the fixed reduction ratio mode and the reduction ratio is less than 10, the resolution of the spectrometer is worse than 1.5eV or the required tolerance limit is ±0.03eV or less. This standard does not provide a full-scale calibration check, which is to be verified for every point that can be found on the energy scale and must be performed in accordance with the instrument manufacturer's recommended procedures.
GB/T 22571-2008 history
2017GB/T 22571-2017 Surface chemical analysis—X-ray photoelectron spectrometers—Calibration of energy scales
2008GB/T 22571-2008 Surface chemical analysis.X-ray photoelectron spectrometers.Calibration of energy scales