ASTM F1723-96
Standard Practice for Evaluation of Polycrystalline Silicon Rods by Float-Zone Crystal Growth and Spectroscopy
- Standard No.
- ASTM F1723-96
- Release Date
- 1996
- Published By
- American Society for Testing and Materials (ASTM)
- Status
- Replace By
- ASTM F1723-02
- Latest
- ASTM F1723-02
- Scope
1.1 This practice recommends procedures for sampling polycrystalline silicon rods and growing single crystals from these samples by the float-zone technique. The resultant single crystal ingots are analyzed by spectrophotometric methods to determine the trace impurities in polysilicon. These trace impurities are acceptor (usually boron or aluminum, or both), donor (usually phosphorus or arsenic, or both), and carbon impurities.
1.2 The useful range of impurity concentration covered by this practice is 0.002 to 100 parts/billion atomic (ppba) for acceptor and donor impurities, and 0.05 to 5 parts/million atomic (ppma) for carbon impurity. These impurities are analyzed in the ingot samples by infrared or photoluminescence spectroscopy.
1.3 This practice is applicable only to evaluation of polysilicon ingots grown by a method that utilizes a slim silicon rod (filament) upon which polycrystalline silicon is deposited.
1.4 This practice uses hot acid to etch away the surface of the polysilicon rod. The etchant is potentially harmful and must be handled in an acid exhaust fume hood with utmost care at all times. Hydrofluoric acid solutions particularly are hazardous and should not be used by anyone who is not familiar with the specific preventative measures and first aid treatments given in the appropriate Material Safety Data Sheet.
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
ASTM F1723-96 Referenced Document
- ASTM D5127 Standard Guide for Ultra Pure Water Used in the Electronics and Semiconductor Industry*， 1999-04-19 Update
- ASTM F1241
- ASTM F1389
- ASTM F1391
- ASTM F1630
- ASTM F26
- ASTM F397 Standard Test Method for Resistivity of Silicon Bars Using a Two-Point Probe
- ASTM F47
- ASTM F723
ASTM F1723-96 history
- 1970 ASTM F1723-02
- 1996 ASTM F1723-96 Standard Practice for Evaluation of Polycrystalline Silicon Rods by Float-Zone Crystal Growth and Spectroscopy
