This standard defines terms used in the practice of electron probe microanalysis (EPMA), including terms for general concepts and terms for specific concepts classified by technical level. This standard applies to all standardization documents related to the practice of electron probe microanalysis (EPMA), and partly applies to related fields [for example: scanning electron microscopy (SEM), analytical electron microscopy (AEM), X-ray spectroscopy, etc.] Standardization document used to define common terminology.