GB/T 12964-2003
Monocrystalline silicon polished wafers (English Version)
- Standard No.
- GB/T 12964-2003
- Language
- Chinese, Available in English version
- Release Date
- 2003
- Published By
- General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
- Status
- 2019-06
- Replace By
- GB/T 12964-2018
- Latest
- GB/T 12964-2018
- Replace
- GB/T 12964-1996
- Scope
- This standard specifies the necessary relevant terminology, product classification, technical requirements, test methods, detection rules, marking, packaging, transportation, storage, etc. of silicon single crystal polished wafers (abbreviated as silicon polished wafers). This standard applies to silicon polishing wafers prepared by single-sided polishing after Czochralski silicon single crystal abrasive wafers are etched and thinned. The products are mainly used to make semiconductor devices such as integrated circuits or as substrates for silicon epitaxial deposition.
GB/T 12964-2003 history
- 2018 GB/T 12964-2018 Monocrystalline silicon polished wafers
- 2003 GB/T 12964-2003 Monocrystalline silicon polished wafers
- 0000 GB/T 12964-1996
