ISO 5302:2003 PDF

Scope: This standard specifies the measurement method for the performance parameters of turbomolecular pumps. It is applicable to all specifications and types of turbomolecular pumps. Includes: a) with mechanical or magnetic bearings; b) with or without additional traction stage. Note: Since the turbomolecular pump requires the support of a backing pump, the following curves will be used as a supplement to the volumetric flow rate-population pressure curve to fully determine its performance: 1. Flow rate curve; 1. Compression ratio curve; 1. Population pressure change curve. Includes all relevant areas and various gases.

ISO 5302:2003 Referenced Document

ISO 3529-2 Vacuum technology — Vocabulary — Part 2: Vacuum pumps and related terms*， 2020-02-25 Update

2003 ISO 5302:2003 Vacuum technology - Turbomolecular pumps - Measurement of performance characteristics