This standard specifies the most important quantities that characterize the characteristics of X-ray energy spectrometers (EDS), which are basically composed of semiconductor detectors, preamplifiers and signal processing systems. This standard only applies to semiconductor detectors EDS based on the solid-state ionization principle. This standard only stipulates the minimum requirements for EDS such as electron probe (EPMA) or scanning electron microscope (SEM). How to implement analysis is not within the scope of this standard.
ISO 15632:2002 history
2021ISO 15632:2021 Microbeam analysis - Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)
2012ISO 15632:2012 Microbeam analysis - Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers for use in electron probe microanalysis
2002ISO 15632:2002 Microbeam analysis - Instrumental specification for energy dispersive X-ray spectrometers with semiconductor detectors