This standard specifies the method for calibrating the image magnification of a scanning electron microscope (hereinafter referred to as SEM) using certified reference materials (hereinafter referred to as CRM) or reference materials (hereinafter referred to as RM). However, this standard does not apply to CD-SEM. However, the calibration magnification range of this standard is limited by the CRM or RM used.
JIS K 0149-1:2008 Referenced Document
JIS Q 0030 Reference materials -- Selected terms and definitions*， 2019-01-21 Update
JIS Q 0034 General requirements for the competence of reference material producers*， 2012-06-20 Update
JIS Q 0035 Reference materials -- Guidance for characterization and assessment of homogeneity and stability*， 2022-03-22 Update
JIS Q 17025 General requirements for the competence of testing and calibration laboratories
JIS K 0149-1:2008 history
2008JIS K 0149-1:2008 Microbeam analysis -- Scanning electron microscopy -- Guidelines for calibrating image magnification