JEDEC JEP144-2002
Guideline for Residual Gas Analysis (RGA) for Microelectronic Packages

Standard No.

JEDEC JEP144-2002

Release Date

2002

Published By

(U.S.) Joint Electron Device Engineering Council Soild State Technology Association

Latest

JEDEC JEP144-2002

Scope

This guideline is applicable to hermetically sealed microelectronic components (including discrete semiconductors, monolithic and hybrid microcircuits). Specific cases with unique packaging, materials, or environmental constraints may not find all of the following information and procedures applicable. A compendium of references to reports, papers, and texts, relating to RGA, volatile gasses, and sealed packages is included in Annex D.

JEDEC JEP144-2002 history

• 2002 JEDEC JEP144-2002 Guideline for Residual Gas Analysis (RGA) for Microelectronic Packages