This standard specifies the method for calibrating the binding energy axis scale of X-ray photoelectron spectrometers that use non-monochromatic Al and Mg and monochromatic Al as an excitation X-ray source when used for normal analytical purposes. This standard is valid only for equipment equipped with an ion gun capable of sputter cleaning measurement samples. In addition, this standard describes a method for determining when to perform calibration to check the linearity of the binding energy axis scale, and a method for determining the calibration value by checking the linearity of the scale at one energy in a given medium. Read the error range. We calibrate the uncertainties of certain high binding energy values and low binding energy scale values, thus defining an uncertainty that allows us to correct for small variations and calibrate the expanded uncertainty of the binding energy axis scale with a confidence limit of 95%. The second uncertainty range includes inter-institutional uncertainties, but does not include all defects that occur in spectroscopic equipment. Additionally, this standard specifies that the energy resolution of the spectrometer is less than 1.5 eV in the following cases, when the energy scale clearly loses linearity, when measuring at a constant energy rejection ratio of less than 10. In the worst case, it cannot be applied when a value of ±0.03eV or less is required as a tolerance range. This standard does not calibrate the energy axis scale for all possible energy points and such calibration should be performed in accordance with the equipment manufacturer's recommendations.
JIS K 0145:2002 history
2002JIS K 0145:2002 Surface chemical analysis -- X-ray photoelectron spectrometers -- Calibration of energy scales