NF C96-050-2*NF EN 62047-2:2006
Semiconductor devices - Micro-electromechanical devices - Part 2 : tensile testing methods of thin film materials.

Standard No.

NF C96-050-2*NF EN 62047-2:2006

Release Date

2006

Published By

Association Francaise de Normalisation

Latest

NF C96-050-2*NF EN 62047-2:2006

NF C96-050-2*NF EN 62047-2:2006 history

• 2006 NF C96-050-2*NF EN 62047-2:2006 Semiconductor devices - Micro-electromechanical devices - Part 2 : tensile testing methods of thin film materials.