ISO 18516:2006
Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Determination of lateral resolution
- Standard No.
- ISO 18516:2006
- Release Date
- 2006
- Published By
- International Organization for Standardization (ISO)
- Status
- Replace By
- ISO 18516:2019
- Latest
- ISO 18516:2019
- Scope
- This International Standard describes three methods for measuring the lateral resolution achievable in Auger electron spectrometers and X-ray photoelectron spectrometers under defined settings. The straight-edge method is suitable for instruments where the lateral resolution is expected to be larger than 1 µm. The grid method is suitable if the lateral resolution is expected to be less than 1 µm but more than 20 nm. The goldisland method is suitable for instruments where the lateral resolution is expected to be smaller than 50 nm. Annexes A, B and C provide illustrative examples of the measurement of lateral resolution.
ISO 18516:2006 Referenced Document
- ISO 18115:2001 Surface chemical analysis - Vocabulary
ISO 18516:2006 history
- 2019 ISO 18516:2019 Surface chemical analysis — Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres
- 2006 ISO 18516:2006 Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Determination of lateral resolution
