GB/T 18682-2002
Specifications of physical vapour deposition TiN films (English Version)

Standard No.

GB/T 18682-2002

Language

Chinese, Available in English version

Release Date

2002

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Latest

GB/T 18682-2002

Scope

This standard specifies the technical requirements for physical vapor deposition of TiN thin films. This standard applies to physical vapor deposition of TiN thin films, and also to TiN thin films prepared by other methods. This standard also applies to other material deposition layers (TiC, TiCN, TiAIN, etc.).

GB/T 18682-2002 history

• 2002 GB/T 18682-2002 Specifications of physical vapour deposition TiN films