IEC 62047-3:2006
Semiconductor devices - Micro electromechanical devices - Part 3: Thin film standard test piece for tensile-testing
- Standard No.
- IEC 62047-3:2006
- Release Date
- 2006
- Published By
- International Electrotechnical Commission (IEC)
- Latest
- IEC 62047-3:2006
- Replace
- IEC 47/1866/FDIS:2006
- Scope
- This International Standard specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10 µm, which are main structural materials for microelectromechanical systems (MEMS), micromachines and similar devices. This International Standard is based on such a concept that a tensile testing system can be guaranteed in propriety and accuracy, when the measured tensile strengths of the standard test pieces, whose tensile strength is pre-determined, are within the designated range. It also specifies the test pieces to minimize characteristics deviation among the pieces.
IEC 62047-3:2006 history
- 2006 IEC 62047-3:2006 Semiconductor devices - Micro electromechanical devices - Part 3: Thin film standard test piece for tensile-testing
