GB/T 20307-2006
General rules for nanometer-scale length measurement by SEM (English Version)

Standard No.

GB/T 20307-2006

Language

Chinese, Available in English version

Release Date

2006

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Latest

GB/T 20307-2006

Scope

This standard specifies the basic principles for the measurement of nanoscale lengths by scanning electron microscopy. Suitable for measuring the distance between points or lines from 10nm to 500nm.

GB/T 20307-2006 Referenced Document

• JJF 1059-1999 Evaluation and Expression of Uncertainty in Measurement

GB/T 20307-2006 history

• 2006 GB/T 20307-2006 General rules for nanometer-scale length measurement by SEM