GB/T 8758-2006
Measuring thickness of epitaxial layers of gallium arsenide by infrared interference (English Version)

Standard No.

GB/T 8758-2006

Language

Chinese, Available in English version

Release Date

2006

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Latest

GB/T 8758-2006

Replace

GB/T 8758-1988

Scope

This standard applies to the measurement of gallium arsenide epitaxial layer thickness, and the measured thickness is greater than 2 μm. It is required that the electronegativity of the substrate material is less than 0.02Ω•cm, and the electronegativity of the epitaxial layer is greater than 0.1Ω•cm.

GB/T 8758-2006 history

• 2006 GB/T 8758-2006 Measuring thickness of epitaxial layers of gallium arsenide by infrared interference
• 1988 GB/T 8758-1988 Measuring thickness of epitaxial layers of gallium arsenide by infrared interference