GJB/J 5463-2005
Verification regulation for measurement equipment of optical film refractive index and thickness (English Version)

Standard No.

GJB/J 5463-2005

Language

Chinese, Available in English version

Release Date

2005

Published By

Military Standard of the People's Republic of China-Commission of Science,Technology and Industry for National Defence

Latest

GJB/J 5463-2005

Scope

This calibration procedure stipulates the calibration technical requirements, calibration items, calibration conditions, calibration methods, processing of calibration results and calibration cycle of the ellipsometry optical film refractive index and thickness tester (hereinafter referred to as the tester) in the spectral range of 250nm ~ 1700nm. This calibration procedure is applicable to the calibration of newly manufactured, in-use and repaired testers.

GJB/J 5463-2005 history

• 2005 GJB/J 5463-2005 Verification regulation for measurement equipment of optical film refractive index and thickness