DIN 50441-2:1998
Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 2: Testing of edge profile

Standard No.

DIN 50441-2:1998

Release Date

1998

Published By

German Institute for Standardization

Status

Withdraw

Latest

DIN 50441-2:1998

Scope

The document specifies four test methods for determination of the edge profile of semiconductor wafers. Three methods base on optical projection, the fourth method specifies the determination of the profile length by a measuring microscope.#,,#

DIN 50441-2:1998 history

• 1998 DIN 50441-2:1998 Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 2: Testing of edge profile