This standard applies to samples that are not in a dry state. Using a scanning electron microscope (hereinafter referred to as SEM) that does not have special functions or structures that enable observation of volatile samples or non-conductive samples, and can be used at a sample chamber pressure of 10 Pa or less, Specifies sample preparation methods for SEM observation of fine ceramic bulk materials and powder materials.
JIS R 1633:1998 history
1998JIS R 1633:1998 Sample preparation method of fine ceramics and fine ceramic powders for scanning electron microscope observation