GB/T 1558-1997
Test method for substitutional atomic carbon content of silicon by infrared absorption (English Version)
- Standard No.
- GB/T 1558-1997
- Language
- Chinese, Available in English version
- Release Date
- 1997
- Published By
- General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
- Status
- 2010-06
- Replace By
- GB/T 1558-2009
- Latest
- GB/T 1558-2023
- Scope
- This standard specifies the infrared absorption measurement method for the content of substituting carbon atoms in silicon. This standard applies to the determination of the concentration of substituting carbon atoms in silicon single crystals with a carrier concentration less than 5×1016cm-3 and a room temperature resistivity greater than 0.1Ω·cm. Since carbon may also be present at interstitial sites, this method cannot determine the total carbon concentration. This standard is also applicable to the determination of the concentration of substituting carbon atoms in polycrystalline silicon, and the carbon in the inter-grain boundary region cannot be determined either. The effective range of this standard for measuring the concentration of carbon atoms is: from the concentration of substituting carbon atoms in silicon at room temperature 1×1016at cm-3(200PPba) to the maximum solubility of carbon atoms, the lower limit at 77K Drop to 5×1015at cm (100PPba).
GB/T 1558-1997 history
- 2023 GB/T 1558-2023 Infrared absorption test method for substituted carbon content in silicon
- 2009 GB/T 1558-2009 Test method for substitutional atomic carbon concent of silicon by infrared absorption
- 1997 GB/T 1558-1997 Test method for substitutional atomic carbon content of silicon by infrared absorption
