JIS H 0615:1996
Test method for determination of impurity concentrations in silicon crystal by photoluminescence spectroscopy

Standard No.

JIS H 0615:1996

Release Date

1996

Published By

Japanese Industrial Standards Committee (JISC)

Status

Be replaced

Replace By

JIS H 0615 ERRATUM 1:2006

Latest

JIS H 0615:2021

Scope

This standard specifies the method for determining the impurity concentration of single-crystal and multi-crystalline silicon by photoluminescence. The measurable impurity elements are boron (B), aluminum (Al), phosphorus (P), and arsenic (As), and the measurable concentration range is 1×1011 to 5×015 atoms/cm3 (0.002 to 100 ppba).

JIS H 0615:1996 history

• 2021 JIS H 0615:2021 Test method for determination of impurity concentrations in silicon crystal by photoluminescence spectroscopy
• 2006 JIS H 0615 ERRATUM 1:2006 ERRATUM
• 1996 JIS H 0615:1996 Test method for determination of impurity concentrations in silicon crystal by photoluminescence spectroscopy