DIN 50441-1:1996
Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 1: Thickness and thickness variation
- Standard No.
- DIN 50441-1:1996
- Release Date
- 1996
- Published By
- German Institute for Standardization
- Status
- Latest
- DIN 50441-1:1996
- Scope
- The method covers determination of the thickness of circular or D-shaped semiconductor wafers with any surface quality by using both contactless and contacting instruments for thickness measurement.
DIN 50441-1:1996 history
- 1996 DIN 50441-1:1996 Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 1: Thickness and thickness variation
