Testing of materials for semiconductor technology; determination of impurity content in silicon by infrared absorption; carbonEssais des matériaux pour la technologie semi-conducteurs; détermination de la teneur en impureté dans le silicium au moyen de l
DIN 50438-2:1982 history
1982DIN 50438-2:1982 Testing of materials for semiconductor technology; determination of impurty content in silicon by infrared absorption; carbon