JIS K 1466:1995
Testing methods for hydrofluoric acid of semi-conductor grade

Standard No.

JIS K 1466:1995

Release Date

1995

Published By

Japanese Industrial Standards Committee (JISC)

Status

Withdraw

Latest

JIS K 1466:1995

JIS K 1466:1995 history

• 1995 JIS K 1466:1995 Testing methods for hydrofluoric acid of semi-conductor grade